9.
Calibration-Free, Split Accelerated Degradation Testing Platform Revealing the Long-Term Reliability of 2-D Micromirrors Without On-Chip Sensors
Ze-Yu Zhou, Kai-Ming Hu, Er-Qi Tu, Heng Zou, Hui-Yue Lin, Fan Yang, Guang Meng, Wen-Ming Zhang
Journal of Microelectromechanical Systems